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Frequency and Bandwidth Design of FR3-Band Acoustic Filters
Authors:
Taran Anusorn,
Omar Barrera,
Jack Kramer,
Ian Anderson,
Ziqian Yao,
Vakhtang Chulukhadze,
Ruochen Lu
Abstract:
This article presents an approach to control the operating frequency and fractional bandwidth (FBW) of miniature acoustic filters in thin-film lithium niobate (TFLN). More specifically, we used the first-order antisymmetric (A1) mode in lateral-field-excited bulk acoustic wave resonators (XBARs) to achieve efficient operation at 20.5 GHz. Our technique leverages the thickness-dependent resonance f…
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This article presents an approach to control the operating frequency and fractional bandwidth (FBW) of miniature acoustic filters in thin-film lithium niobate (TFLN). More specifically, we used the first-order antisymmetric (A1) mode in lateral-field-excited bulk acoustic wave resonators (XBARs) to achieve efficient operation at 20.5 GHz. Our technique leverages the thickness-dependent resonance frequency of A1 XBARs, combined with the in-plane anisotropic properties of 128$^\circ$ Y-cut TFLN, to customize filter characteristics. The implemented three-element ladder filter prototype achieves an insertion loss (IL) of only 1.79 dB and a controlled 3-dB FBW of 8.58% at 20.5 GHz, with an out-of-band (OoB) rejection greater than 14.9 dB across the entire FR3 band, while featuring a compact footprint of 0.90 $\times$ 0.74 mm$^2$. Moreover, an eight-element filter prototype shows an IL of 3.80 dB, an FBW of 6.12% at 22.0 GHz, and a high OoB rejection of 22.97 dB, demonstrating the potential for expanding to higher-order filters. As frequency allocation requirements become more stringent in future FR3 bands, our technique showcases promising capability in enabling compact and monolithic filter banks toward next-generation acoustic filters for 6G and beyond.
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Submitted 23 May, 2025;
originally announced May 2025.
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High-Q Millimeter-Wave Acoustic Resonators in Thin-Film Lithium Niobate Using Higher-Order Antisymmetric Modes
Authors:
Vakhtang Chulukhadze,
Jack Kramer,
Tzu-Hsuan Hsu,
Omar Barrera,
Ruochen Lu
Abstract:
This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode laterally excited bulk acoustic resonators (XBAR). Compared to prior demonstrations, the proposed platform features a compact footprint due to a smaller lateral w…
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This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode laterally excited bulk acoustic resonators (XBAR). Compared to prior demonstrations, the proposed platform features a compact footprint due to a smaller lateral wavelength and aperture. We showcase an A3 mode device operating at 39.8 GHz with a high extracted electromechanical coupling (k2) of 4%, a high 3-dB series resonance quality factor (Q_s) of 97, and a high 3-dB anti-resonance quality factor (Q_p) of 342, leading to a figure of merit (FoM=k^2*Q_p) of 13.7 with a footprint of 32x44 micron^2. To demonstrate frequency scalability, the piezoelectric film thickness is varied while keeping the device layout. As a result, we present a multitude of high-performance devices covering a wide frequency range of 30-50 GHz, validating the proposed XBAR design at mmWave.
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Submitted 22 May, 2025; v1 submitted 28 April, 2025;
originally announced May 2025.
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Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Authors:
Sinwoo Cho,
Yinan Wang,
Eugene Kwon,
Lezli Matto,
Omar Barrera,
Michael Liao,
Jack Kramer,
Tzu-Hsuan Hsu,
Vakhtang Chulukhadze,
Ian Anderson,
Mark Goorksy,
Ruochen Lu
Abstract:
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality factor (Q) of 208, resulting in a figure of merit (FoM, Qk2) of 19.8. ScAlN resonators employ a stack of 90 nm thick 20% Sc doping ScAlN piezoelectric film on the floating bottom 38 nm thick platinum (Pt) electrode to ac…
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This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality factor (Q) of 208, resulting in a figure of merit (FoM, Qk2) of 19.8. ScAlN resonators employ a stack of 90 nm thick 20% Sc doping ScAlN piezoelectric film on the floating bottom 38 nm thick platinum (Pt) electrode to achieve low losses and high coupling toward centimeter wave (cmWave) frequency band operation. Three fabricated and FBARs are reported, show promising prospects of ScAlN-Pt stack towards cmWave front-end filters.
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Submitted 30 April, 2025; v1 submitted 28 April, 2025;
originally announced April 2025.
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Ku-Band AlScn-On-Diamond SAW Resonators with Phase Velocity above 8600 m/s
Authors:
Tzu-Hsuan Hsu,
Kapil Saha,
Jack Kramer,
Omar Barrera,
Pietro Simoni,
Matteo Rinaldi,
Ruochen Lu
Abstract:
In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity ($v_p$) of 8671 m/s, a maximum Bode-$Q$ of 408, and coupling coefficient ($k_{\mathrm{eff}}^2$)…
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In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa-mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity ($v_p$) of 8671 m/s, a maximum Bode-$Q$ of 408, and coupling coefficient ($k_{\mathrm{eff}}^2$) of 2.1%, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8-18 GHz are presented. The platform's high power handling above 12.5 dBm is also experimentally validated.
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Submitted 28 April, 2025;
originally announced April 2025.
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Acoustic resonators above 100 GHz
Authors:
Jack Kramer,
Bryan T. Bosworth,
Lezli Matto,
Nicholas R. Jungwirth,
Omar Barrera,
Florian Bergmann,
Sinwoo Cho,
Vakhtang Chulukhadze,
Mark Goorsky,
Nathan D. Orloff,
Ruochen Lu
Abstract:
Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics push to millimeter waves frequencies, designers must increase the operating frequency of the resonator. The current state-of-the-art approach to increase the operating frequency is to decrease the thickness of the piezoelec…
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Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics push to millimeter waves frequencies, designers must increase the operating frequency of the resonator. The current state-of-the-art approach to increase the operating frequency is to decrease the thickness of the piezoelectric film to shorten the acoustic wavelength or to use higher order modes. Unfortunately, maintaining high crystal quality typically requires thicker piezoelectric layers. Thinner layers suffer from higher defect densities and increased surface damping, which degrade the electromechanical coupling and quality factor. While acoustic high order modes can also increase operating frequency, the electromechanical coupling rapidly decreases with increasing mode number. Here, we overcome these limitations by utilizing a piezoelectric stack of three layers of lithium niobate with alternating crystallographic orientations to preferentially support higher order modes and thereby enhance the electromechanical coupling without degrading the quality factor. Our approach improves the figure of merit of millimeter-wave acoustic resonators by roughly an order of magnitude greater compared to state-of-the-art piezoelectric resonators above 60 GHz. This concept of alternating crystallographic orientations facilitates a new path to develop millimeter wave resonators with high figures of merit, low insertion loss, and miniature footprints, enabling new applications in millimeter wave signal processing and computing.
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Submitted 5 February, 2025;
originally announced February 2025.
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Low-Loss Higher-Order Cross-Sectional Lamé Mode SAW Devices in 10-20 GHz Range
Authors:
Ian Anderson,
Tzu-Hsuan Hsu,
Vakhtang Chulukhadze,
Jack Kramer,
Sinwoo Cho,
Omar A. Barrera,
Joshua Campbell,
Ming-Huang Li,
Ruochen Lu
Abstract:
This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 50 nm aluminum patterns on 600 nm X-Cut LN on amorphous silicon on silicon carbide, where longitudinally dominant SAW was targeted. Upon fabrication, higher-order thickness-based cross-sectional Lamé modes and Rayleigh mo…
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This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 50 nm aluminum patterns on 600 nm X-Cut LN on amorphous silicon on silicon carbide, where longitudinally dominant SAW was targeted. Upon fabrication, higher-order thickness-based cross-sectional Lamé modes and Rayleigh modes were studied for their Q factors using acoustic delay lines. Utilizing bi-directional electrodes, ADL with lateral lambda values ranging from 0.4 um to 0.6 um were measured. Higher order Lame modes were found to have consistently higher Q factors than their Rayleigh mode counterpart, on the order of 1000-3000, showing high-frequency SAW devices as still viable candidates for frequency scaling without a substantial increase in loss.
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Submitted 19 October, 2024; v1 submitted 21 September, 2024;
originally announced September 2024.
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18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector
Authors:
Omar Barrera,
Nishanth Ravi,
Kapil Saha,
Supratik Dasgupta,
Joshua Campbell,
Jack Kramer,
Eugene Kwon,
Tzu-Hsuan Hsu,
Sinwoo Cho,
Ian Anderson,
Pietro Simeoni,
Jue Hou,
Matteo Rinaldi,
Mark S. Goorsky,
Ruochen Lu
Abstract:
This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAlN) on top of silicon dioxide (SiO2) and tantalum pentoxide (Ta2O5) Bragg reflectors on silicon (Si) wafer. The stack is analyzed with X-ray reflectivity (XRR) and high-resolution X-ray diffraction (HRXRD). The resonator…
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This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAlN) on top of silicon dioxide (SiO2) and tantalum pentoxide (Ta2O5) Bragg reflectors on silicon (Si) wafer. The stack is analyzed with X-ray reflectivity (XRR) and high-resolution X-ray diffraction (HRXRD). The resonator shows a coupling coefficient (k2) of 2.0%, high series quality factor (Qs) of 156, shunt quality factor (Qp) of 142, and maximum Bode quality factor (Qmax) of 210. The third-order harmonics at 59.64 GHz is also observed with k2 around 0.6% and Q around 40. Upon further development, the reported acoustic resonator platform can enable various front-end signal-processing functions, e.g., filters and oscillators, at future frequency range 3 (FR3) bands.
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Submitted 7 September, 2024; v1 submitted 2 July, 2024;
originally announced July 2024.
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Acoustic and Electromagnetic Co-Modeling of Piezoelectric Devices at Millimeter Wave
Authors:
Tianyi Zhang,
Yen-Wei Chang,
Omar Barrera,
Naveed Ahmed,
Jack Kramer,
Ruochen Lu
Abstract:
This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and electromagnetic (EM) effects, e.g., self-inductance, in both the circuit-level fitting and finite element analysis, toward higher accuracy at higher frequencies. To validat…
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This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and electromagnetic (EM) effects, e.g., self-inductance, in both the circuit-level fitting and finite element analysis, toward higher accuracy at higher frequencies. To validate the method, thin-film lithium niobate (LiNbO3) first-order antisymmetric (A1) mode devices are used as the testbed, achieving great agreement for both the standalone resonators and a fifth-order ladder filter. Upon further development, the reported acoustic and EM co-modeling could guide the future design of compact piezoelectric devices at mmWave and beyond.
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Submitted 20 June, 2024; v1 submitted 29 May, 2024;
originally announced May 2024.
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2 to 16 GHz Fundamental Symmetric Mode Acoustic Resonators in Piezoelectric Thin-Film Lithium Niobate
Authors:
Vakhtang Chulukhadze,
Jack Kramer,
Tzu-Hsuan Hsu,
Omar Barrera,
Ian Anderson,
Sinwoo Cho,
Joshua Campbell,
Ruochen Lu
Abstract:
As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonators operating in the fundamental symmetric (S0) Lamb mode hold significant promise if frequency scaled to the 6G centimeter bands. Concurrently, the lateral wavelength dependency and the traveling wave nature of S0 mode en…
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As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonators operating in the fundamental symmetric (S0) Lamb mode hold significant promise if frequency scaled to the 6G centimeter bands. Concurrently, the lateral wavelength dependency and the traveling wave nature of S0 mode enable monolithic multi-frequency fabrication, transversal filters, correlators, and other compact signal processing components. In this work, we present thin-film lithium niobate (LN) S0 resonators scaled up to 16 GHz. Specifically, we study the characteristics of the S0 mode as the wavelength is minimized and showcase a device at 14.9 GHz with a Bode Q maximum of 391, a k2 of 6%, and a figure of merit (FoM) of 23.33, surpassing the state-of-the-art (SoA) in its frequency range.
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Submitted 13 May, 2024;
originally announced May 2024.
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Experimental Study of Periodically Poled Piezoelectric Film Lithium Niobate Resonator at Cryogenic Temperatures
Authors:
Jack Kramer,
Omar Barrera,
Sinwoo Cho,
Vakhtang Chulukhadze,
Tzu-Hsuan Hsu,
Ruochen Lu
Abstract:
This work reports the first study of periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) resonators at cryogenic temperatures. We experimentally investigate the temperature dependency of resonant frequencies and quality factor (Q) of higher-order Lamb modes up to 20 GHz between 80°K and 297°K, using a tri-layer P3F LiNbO3 resonators as the experimental platform. The supported thic…
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This work reports the first study of periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) resonators at cryogenic temperatures. We experimentally investigate the temperature dependency of resonant frequencies and quality factor (Q) of higher-order Lamb modes up to 20 GHz between 80°K and 297°K, using a tri-layer P3F LiNbO3 resonators as the experimental platform. The supported thickness-shear Lamb modes between second-order symmetric (S2) and eleventh-order antisymmetric (A11) modes show temperature coefficients of frequency (TCF) averaging -68.8 ppm/K. Higher Q and more pronounced spurious modes are observed at lower temperatures for many modes. Upon further study, the cryogenic study will be crucial for identifying dominant loss mechanisms and origins of spurious modes in higher-order Lamb wave devices for millimeter-wave applications.
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Submitted 14 March, 2024;
originally announced March 2024.
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23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW
Authors:
Sinwoo Cho,
Omar Barrera,
Jack Kramer,
Vakhtang Chulukhadze,
Tzu-Hsuan Hsu,
Joshua Campbell,
Ian Anderson,
Ruochen Lu
Abstract:
This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52 dB and 3-dB fractional bandwidth (FBW) of 19.4%. The filter features a compact footprint of 0.64 mm2. The third-order ladder filter is implemented with electrically coupled resonators in 150 nm bi-layer P3F 128 rotated Y…
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This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52 dB and 3-dB fractional bandwidth (FBW) of 19.4%. The filter features a compact footprint of 0.64 mm2. The third-order ladder filter is implemented with electrically coupled resonators in 150 nm bi-layer P3F 128 rotated Y-cut LiNbO3 thin film, operating in second-order symmetric (S2) Lamb mode. The record-breaking performance is enabled by the P3F LiNbO3 platform, where piezoelectric thin films of alternating orientations are transferred subsequently, facilitating efficient higher-order Lamb mode operation with simultaneously high quality factor (Q) and coupling coefficient (k2) at millimeter-wave (mmWave). Also, the multi-layer P3F stack promises smaller footprints and better nonlinearity than single-layer counterparts, thanks to the higher capacitance density and lower thermal resistance. Upon further development, the reported P3F LiNbO3 platform is promising for compact filters at mmWave.
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Submitted 28 June, 2024; v1 submitted 19 February, 2024;
originally announced February 2024.
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Accelerating superconductor discovery through tempered deep learning of the electron-phonon spectral function
Authors:
Jason B. Gibson,
Ajinkya C. Hire,
Philip M. Dee,
Oscar Barrera,
Benjamin Geisler,
Peter J. Hirschfeld,
Richard G. Hennig
Abstract:
Integrating deep learning with the search for new electron-phonon superconductors represents a burgeoning field of research, where the primary challenge lies in the computational intensity of calculating the electron-phonon spectral function, $α^2F(ω)$, the essential ingredient of Midgal-Eliashberg theory of superconductivity. To overcome this challenge, we adopt a two-step approach. First, we com…
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Integrating deep learning with the search for new electron-phonon superconductors represents a burgeoning field of research, where the primary challenge lies in the computational intensity of calculating the electron-phonon spectral function, $α^2F(ω)$, the essential ingredient of Midgal-Eliashberg theory of superconductivity. To overcome this challenge, we adopt a two-step approach. First, we compute $α^2F(ω)$ for 818 dynamically stable materials. We then train a deep-learning model to predict $α^2F(ω)$, using an unconventional training strategy to temper the model's overfitting, enhancing predictions. Specifically, we train a Bootstrapped Ensemble of Tempered Equivariant graph neural NETworks (BETE-NET), obtaining an MAE of 0.21, 45 K, and 43 K for the Eliashberg moments derived from $α^2F(ω)$: $λ$, $ω_{\log}$, and $ω_{2}$, respectively, yielding an MAE of 2.5 K for the critical temperature, $T_c$. Further, we incorporate domain knowledge of the site-projected phonon density of states to impose inductive bias into the model's node attributes and enhance predictions. This methodological innovation decreases the MAE to 0.18, 29 K, and 28 K, respectively, yielding an MAE of 2.1 K for $T_c$. We illustrate the practical application of our model in high-throughput screening for high-$T_c$ materials. The model demonstrates an average precision nearly five times higher than random screening, highlighting the potential of ML in accelerating superconductor discovery. BETE-NET accelerates the search for high-$T_c$ superconductors while setting a precedent for applying ML in materials discovery, particularly when data is limited.
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Submitted 29 January, 2024;
originally announced January 2024.
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Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes
Authors:
Sinwoo Cho,
Omar Barrera,
Pietro Simeoni,
Ellie Y. Wang,
Jack Kramer,
Vakhtang Chulukhadze,
Joshua Campbell,
Matteo Rinaldi,
Ruochen Lu
Abstract:
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum (Al) electrodes, i.e., Al top Al bottom, Pt top Al bottom, Al top Pt bottom, and Pt top Pt bottom, are built to study the impact of electrodes on mmWave FBARs. Th…
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This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum (Al) electrodes, i.e., Al top Al bottom, Pt top Al bottom, Al top Pt bottom, and Pt top Pt bottom, are built to study the impact of electrodes on mmWave FBARs. The demonstrated FBAR with Pt top and bottom electrodes achieve electromechanical coupling (k2) of 4.0% and Q of 116 for the first-order symmetric (S1) mode at 13.7 GHz, and k2 of 1.8% and Q of 94 for third-order symmetric (S3) mode at 61.6 GHz. Through these results, we confirmed that even in the frequency band of approximately 60 GHz, ScAlN FBAR can achieve a Q factor approaching 100 with optimized fabrication and acoustic/EM design. Further development calls for stacks with better quality in piezoelectric and metallic layers.
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Submitted 22 November, 2023;
originally announced November 2023.
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Transferred Thin Film Lithium Niobate as Millimeter Wave Acoustic Filter Platforms
Authors:
Omar Barrera,
Sinwoo Cho,
Kenny Hyunh,
Jack Kramer,
Michael Liao,
Vakhtang Chulukhadze,
Lezli Matto,
Mark S. Goorsky,
Ruochen Lu
Abstract:
This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3) substrates with an intermediate amorphous Si (aSi) bonding and sacrificial layer, we demonstrate compact acoustic filters with record-breaking performance beyo…
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This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3) substrates with an intermediate amorphous Si (aSi) bonding and sacrificial layer, we demonstrate compact acoustic filters with record-breaking performance beyond 20 GHz. In the LN-aSi-Al2O3 platform, the third-order ladder filter exhibits low insertion loss (IL) of 1.62 dB and 3-dB fractional bandwidth (FBW) of 19.8% at 22.1 GHz, while in the LN-aSi-Si platform, the filter shows low IL of 2.38 dB and FBW of 18.2% at 23.5 GHz. Material analysis validates the great crystalline quality of the stacks. The high-resolution x-ray diffraction (HRXRD) shows full width half maximum (FWHM) of 53 arcsec for Al2O3 and 206 arcsec for Si, both remarkably low compared to piezoelectric thin films of similar thickness. The reported results bring the state-of-the-art (SoA) of compact acoustic filters to much higher frequencies, and highlight transferred LiNbO3 as promising platforms for mmWave filters in future wireless front ends.
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Submitted 21 November, 2023;
originally announced November 2023.
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38.7 GHz Thin Film Lithium Niobate Acoustic Filter
Authors:
Omar Barrera,
Sinwoo Cho,
Jack Kramer,
Vakhtang Chulukhadze,
Joshua Campbell,
Ruochen Lu
Abstract:
In this work, a 38.7 GHz acoustic wave ladder filter exhibiting insertion loss (IL) of 5.63 dB and 3-dB fractional bandwidth (FBW) of 17.6% is demonstrated, pushing the frequency limits of thin-film piezoelectric acoustic filter technology. The filter achieves operating frequency up to 5G millimeter wave (mmWave) frequency range 2 (FR2) bands, by thinning thin-film LiNbO3 resonators to sub-50 nm t…
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In this work, a 38.7 GHz acoustic wave ladder filter exhibiting insertion loss (IL) of 5.63 dB and 3-dB fractional bandwidth (FBW) of 17.6% is demonstrated, pushing the frequency limits of thin-film piezoelectric acoustic filter technology. The filter achieves operating frequency up to 5G millimeter wave (mmWave) frequency range 2 (FR2) bands, by thinning thin-film LiNbO3 resonators to sub-50 nm thickness. The high electromechanical coupling (k2) and quality factor (Q) of first-order antisymmetric (A1) mode resonators in 128 Y-cut lithium niobate (LiNbO3) collectively enable the first acoustic filters at mmWave. The key design consideration of electromagnetic (EM) resonances in interdigitated transducers (IDT) is addressed and mitigated. These results indicate that thin-film piezoelectric resonators could be pushed to 5G FR2 bands. Further performance enhancement and frequency scaling calls for better resonator technologies and EM-acoustic filter co-design.
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Submitted 9 November, 2023;
originally announced November 2023.
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Fundamental Antisymmetric Mode Acoustic Resonator in Periodically Poled Piezoelectric Film Lithium Niobate
Authors:
Omar Barrera,
Jack Kramer,
Ryan Tetro,
Sinwoo Cho,
Vakhtang Chulukhadze,
Luca Colombo,
Ruochen Lu
Abstract:
Radio frequency (RF) acoustic resonators have long been used for signal processing and sensing. Devices that integrate acoustic resonators benefit from their slow phase velocity (vp), in the order of 3 to 10 km/s, which allows miniaturization of the device. Regarding the subject of small form factor, acoustic resonators that operate at the so-called fundamental antisymmetric mode (A0), feature eve…
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Radio frequency (RF) acoustic resonators have long been used for signal processing and sensing. Devices that integrate acoustic resonators benefit from their slow phase velocity (vp), in the order of 3 to 10 km/s, which allows miniaturization of the device. Regarding the subject of small form factor, acoustic resonators that operate at the so-called fundamental antisymmetric mode (A0), feature even slower vp (1 to 3 km/s), which allows for smaller devices. This work reports the design and fabrication of A0 mode resonators leveraging the advantages of periodically poled piezoelectricity (P3F) lithium niobate, which includes a pair of piezoelectric layers with opposite polarizations to mitigate the charge cancellation arising from opposite stress of A0 in the top and bottom piezoelectric layers. The fabricated device shows a quality factor (Q) of 800 and an electromechanical coupling (k2) of 3.29, resulting in a high figure of merit (FoM, Q times k2) of 26.3 at the resonant frequency of 294 MHz, demonstrating the first efficient A0 device in P3F platforms. The proposed A0 platform could enable miniature signal processing, sensing, and ultrasound transducer applications upon optimization.
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Submitted 27 August, 2023;
originally announced September 2023.
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Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride
Authors:
Sinwoo Cho,
Omar Barrera,
Pietro Simeoni,
Emily N. Marshall,
Jack Kramer,
Keisuke Motoki,
Tzu-Hsuan Hsu,
Vakhtang Chulukhadze,
Matteo Rinaldi,
W. Alan Doolittle,
Ruochen Lu
Abstract:
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency scaling sputtered ScAlN into mmWave and proposes a stack and new fabrication procedure with a sputtered Sc0.3Al0.7N on Al on Si carrier wafer. The resonator achieves electromechanical coupling (k2) of 7.0% and quality fa…
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This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency scaling sputtered ScAlN into mmWave and proposes a stack and new fabrication procedure with a sputtered Sc0.3Al0.7N on Al on Si carrier wafer. The resonator achieves electromechanical coupling (k2) of 7.0% and quality factor (Q) of 62 for the first-order symmetric (S1) mode at 21.4 GHz, along with k2 of 4.0% and Q of 19 for the third-order symmetric (S3) mode at 55.4 GHz, showing higher figures of merit (FoM, k2xQ) than reported AlN/ScAlN-based mmWave acoustic resonators. The ScAlN quality is identified by transmission electron microscopy (TEM) and X-ray diffraction (XRD), identifying the bottlenecks in the existing piezoelectric-metal stack. Further improvement of ScAlN/AlN-based mmWave acoustic resonators calls for better crystalline quality from improved thin-film deposition methods.
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Submitted 6 September, 2023;
originally announced September 2023.
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On the characteristics of natural hydraulic dampers: An image-based approach to study the fluid flow behaviour inside the human meniscal tissue
Authors:
J. Waghorne,
F. P. Bonomo,
A. Rabbani,
D. Bell,
O. Barrera
Abstract:
The meniscal tissue is a layered material with varying properties influenced by collagen content and arrangement. Understanding the relationship between structure and properties is crucial for disease management, treatment development, and biomaterial design. The internal layer of the meniscus is softer and more deformable than the outer layers, thanks to interconnected collagen channels that guid…
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The meniscal tissue is a layered material with varying properties influenced by collagen content and arrangement. Understanding the relationship between structure and properties is crucial for disease management, treatment development, and biomaterial design. The internal layer of the meniscus is softer and more deformable than the outer layers, thanks to interconnected collagen channels that guide fluid flow. To investigate these relationships, we propose a novel approach that combines Computational Fluid Dynamics (CFD) with Image Analysis (CFD-IA). We analyze fluid flow in the internal architecture of the human meniscus across a range of inlet velocities (0.1mm/s to 1.6m/s) using high-resolution 3D micro-computed tomography scans. Statistical correlations are observed between architectural parameters (tortuosity, connectivity, porosity, pore size) and fluid flow parameters (Re number distribution, permeability). Some channels exhibit Re values of 1400 at an inlet velocity of 1.6m/s, and a transition from Darcy's regime to a non-Darcian regime occurs around an inlet velocity of 0.02m/s. Location-dependent permeability ranges from 20-32 Darcy. Regression modelling reveals a strong correlation between fluid velocity and tortuosity at high inlet velocities, as well as with channel diameter at low inlet velocities. At higher inlet velocities, flow paths deviate more from the preferential direction, resulting in a decrease in the concentration parameter by an average of 0.4. This research provides valuable insights into the fluid flow behaviour within the meniscus and its structural influences.
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Submitted 24 July, 2023;
originally announced July 2023.
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Ancestral Spin Information in Gravitational Waves from Black Hole Mergers
Authors:
O. Barrera,
I. Bartos
Abstract:
The heaviest black holes discovered through gravitational waves have masses that are difficult to explain with current standard stellar models. This discrepancy may be due to a series of hierarchical mergers, where the observed black holes are themselves the products of previous mergers. Here we present a method to estimate the masses and spins of previous generations of black holes based on the m…
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The heaviest black holes discovered through gravitational waves have masses that are difficult to explain with current standard stellar models. This discrepancy may be due to a series of hierarchical mergers, where the observed black holes are themselves the products of previous mergers. Here we present a method to estimate the masses and spins of previous generations of black holes based on the masses and spins of black holes in a binary. Examining the merger GW190521, we find that assuming black hole spins that are consistent with those of merger remnants will alter the reconstructed ancestral spins when compared to results with uninformed priors. At the same time, the inclusion of black hole spins does not significantly affect the mass distributions of the ancestral black holes.
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Submitted 21 July, 2023;
originally announced July 2023.
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Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz
Authors:
Jack Kramer,
Vakhtang Chulukhadze,
Kenny Huynh,
Omar Barrera,
Michael Liao,
Sinwoo Cho,
Lezli Matto,
Mark S. Goorsky,
Ruochen Lu
Abstract:
This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator employs a novel bilayer periodically poled piezoelectric film (P3F) 128 Y-cut LiNbO3 on amorphous silicon (a-Si) on sapphire stack to achieve low losses and high cou…
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This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator employs a novel bilayer periodically poled piezoelectric film (P3F) 128 Y-cut LiNbO3 on amorphous silicon (a-Si) on sapphire stack to achieve low losses and high coupling at millimeter wave (mm-wave). The device also shows a Q of 159, k2 of 65.06%, and FoM of 103.4 for the 16.99 GHz tone. This result shows promising prospects of P3F LiNbO3 towards mm-wave front-end filters.
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Submitted 11 July, 2023;
originally announced July 2023.
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Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW
Authors:
Omar Barrera,
Sinwoo Cho,
Lezli Matto,
Jack Kramer,
Kenny Huynh,
Vakhtang Chulukhadze,
Yen-Wei Chang,
Mark S. Goorsky,
Ruochen Lu
Abstract:
This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic resonators in 100 nm 128° Y-cut lithium niobate (LiNbO3) piezoelectric thin film, operating in the first-order antisymmetric (A1) mode. A new film stack, namely tr…
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This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic resonators in 100 nm 128° Y-cut lithium niobate (LiNbO3) piezoelectric thin film, operating in the first-order antisymmetric (A1) mode. A new film stack, namely transferred thin-film LiNbO3 on silicon (Si) substrate with an intermediate amorphous silicon (a-Si) layer, facilitates the record-breaking performance at millimeter-wave (mmWave). The filter features a compact footprint of 0.56 mm2. In this letter, acoustic and EM consideration, along with material characterization with X-ray diffraction and verified with cross-sectional electron microscopy are reported. Upon further development, the reported filter platform can enable various front-end signal-processing functions at mmWave.
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Submitted 10 July, 2023;
originally announced July 2023.
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On the fractional transversely isotropic functionally graded nature of soft biological tissues
Authors:
Sachin Gunda,
Sundararajan Natarajan,
Olga Barrera
Abstract:
This paper focuses on the origin of the poroelastic anisotropic behaviour of the meniscal tissue and its spatially varying properties. We present confined compression creep test results on samples extracted from three parts of the tissue (Central body, Anterior horn and Posterior horn) in three orientations (Circumferential, Radial and Vertical). We show that a poroelastic model in which the fluid…
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This paper focuses on the origin of the poroelastic anisotropic behaviour of the meniscal tissue and its spatially varying properties. We present confined compression creep test results on samples extracted from three parts of the tissue (Central body, Anterior horn and Posterior horn) in three orientations (Circumferential, Radial and Vertical). We show that a poroelastic model in which the fluid flow evolution is ruled by non-integer order operators (fractional Darcy's law) provides accurate agreement with the experimental creep data. The model is validated against two additional sets of experimental data: stress relaxation and fluid loss during the consolidation process measured as weight reduction. Results show that the meniscus can be considered as a transversely isotropic poroelastic material. This behaviour is due to the fluid flow rate being about three times higher in the circumferential direction than in the radial and vertical directions in the body region of the meniscus. In the anterior horn, the elastic properties are transversely isotropic, with the aggregate modulus higher in the radial direction than in the circumferential and vertical directions. The 3D fractional poroelastic model is implemented in finite element software and quantities such as flux of interstitial fluid during the consolidation process, a non-trivial experimental measure, are determined.
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Submitted 5 January, 2023;
originally announced January 2023.
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The applicability of transperceptual and deep learning approaches to the study and mimicry of complex cartilaginous tissues
Authors:
J. Waghorne,
C. Howard,
H. Hu,
J. Pang,
W. J. Peveler,
L. Harris,
O. Barrera
Abstract:
Complex soft tissues, for example the knee meniscus, play a crucial role in mobility and joint health, but when damaged are incredibly difficult to repair and replace. This is due to their highly hierarchical and porous nature which in turn leads to their unique mechanical properties. In order to design tissue substitutes, the internal architecture of the native tissue needs to be understood and r…
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Complex soft tissues, for example the knee meniscus, play a crucial role in mobility and joint health, but when damaged are incredibly difficult to repair and replace. This is due to their highly hierarchical and porous nature which in turn leads to their unique mechanical properties. In order to design tissue substitutes, the internal architecture of the native tissue needs to be understood and replicated. Here we explore a combined audio-visual approach - so called transperceptual - to generate artificial architectures mimicking the native ones. The proposed method uses both traditional imagery, and sound generated from each image as a method of rapidly comparing and contrasting the porosity and pore size within the samples. We have trained and tested a generative adversarial network (GAN) on the 2D image stacks. The impact of the training set of images on the similarity of the artificial to the original dataset was assessed by analyzing two samples. The first consisting of n=478 pairs of audio and image files for which the images were downsampled to 64 $\times$ 64 pixels, the second one consisting of n=7640 pairs of audio and image files for which the full resolution 256 $\times$ 256 pixels is retained but each image is divided into 16 squares to maintain the limit of 64 $\times$ 64 pixels required by the GAN. We reconstruct the 2D stacks of artificially generated datasets into 3D objects and run image analysis algorithms to characterize statistically the architectural parameters - pore size, tortuosity and pore connectivity - and compare them with the original dataset. Results show that the artificially generated dataset that undergoes downsampling performs better in terms of parameter matching. Our audiovisual approach has the potential to be extended to larger data sets to explore both how similarities and differences can be audibly recognized across multiple samples.
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Submitted 21 November, 2022;
originally announced November 2022.
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An a posteriori error estimator for the spectral fractional power of the Laplacian
Authors:
Raphaël Bulle,
Olga Barrera,
Stéphane P. A. Bordas,
Franz Chouly,
Jack S. Hale
Abstract:
We develop a novel a posteriori error estimator for the $L^2$ error committed by the finite element discretization of the solution of the fractional Laplacian. Our a posteriori error estimator takes advantage of the semi-discretization scheme using rational approximations which allow to reformulate the fractional problem into a family of non-fractional parametric problems. The estimator involves a…
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We develop a novel a posteriori error estimator for the $L^2$ error committed by the finite element discretization of the solution of the fractional Laplacian. Our a posteriori error estimator takes advantage of the semi-discretization scheme using rational approximations which allow to reformulate the fractional problem into a family of non-fractional parametric problems. The estimator involves applying the implicit Bank-Weiser error estimation strategy to each parametric non-fractional problem and reconstructing the fractional error through the same rational approximation used to compute the solution to the original fractional problem. In addition we propose an algorithm to adapt both the finite element mesh and the rational scheme in order to balance the discretization errors. We provide several numerical examples in both two and three-dimensions demonstrating the effectivity of our estimator for varying fractional powers and its ability to drive an adaptive mesh refinement strategy.
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Submitted 10 March, 2023; v1 submitted 11 February, 2022;
originally announced February 2022.
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Ancestral Black Holes of Binary Merger GW190521
Authors:
Oscar Barrera,
Imre Bartos
Abstract:
GW190521 was the most massive black hole merger discovered by LIGO/Virgo so far, with masses in tension with stellar evolution models. A possible explanation of such heavy black holes is that they themselves are the remnants of previous mergers of lighter black holes. Here we estimate the masses of the ancestral black holes of GW190521, assuming it is the end product of previous mergers. We find t…
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GW190521 was the most massive black hole merger discovered by LIGO/Virgo so far, with masses in tension with stellar evolution models. A possible explanation of such heavy black holes is that they themselves are the remnants of previous mergers of lighter black holes. Here we estimate the masses of the ancestral black holes of GW190521, assuming it is the end product of previous mergers. We find that the heaviest parental black holes has a mass of $62^{+21}_{-19}$ M$_\odot$ (90% credible level). We find 78% probability that it is in the $50$ M$_\odot-120$ M$_\odot$ mass gap, indicating that it may also be the end product of a previous merger. We therefore also compute the expected mass distributions of the "grandparent" black holes of GW190521, assuming they existed. Ancestral black hole masses could represent an additional puzzle piece in identifying the origin of LIGO/Virgo/KAGRA's heaviest black holes.
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Submitted 24 January, 2022;
originally announced January 2022.
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Model selection and sensitivity analysis in the biomechanics of soft tissues: a case study on the human knee meniscus
Authors:
Elsiddig Elmukashfi,
Gregorio Marchiori,
Matteo Berni,
Giorgio Cassiolas,
Nicola Francesco Lopomo,
Hussein Rappel,
Mark Girolami,
Olga Barrera
Abstract:
Soft tissues - such as ligaments and tendons - primarily consist of solid (collagen, predominantly) and liquid phases. Understanding the interaction between such components and how they change under physiological loading sets the basis for elucidating the essential link between their internal structure and mechanical behaviour. In fact, the internal heterogeneous structure of this kind of tissues…
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Soft tissues - such as ligaments and tendons - primarily consist of solid (collagen, predominantly) and liquid phases. Understanding the interaction between such components and how they change under physiological loading sets the basis for elucidating the essential link between their internal structure and mechanical behaviour. In fact, the internal heterogeneous structure of this kind of tissues leads to a wide range of mechanical behaviours, which then determine their own function(s). Characterising these behaviours implies an important experimental effort in terms of tissue harvesting, samples preparation and implementation of testing protocols - which, often, are not standardised. These issues lead to several difficulties in both collecting and providing comparable and reliable information. In order to model the behaviours of heterogeneous tissues and identify material parameters, a large volume of reproducible experimental data is required; unfortunately, such an amount of information is often not available. In reality, most of the studies that are focused on the identification of material parameters, are largely based on small sets of experimental data, which present a large variability. Such a large variability opens on to uncertainties in the estimation of material parameters, as reported in the literature. Hence, the use of a rigorous probabilistic framework, that is able to address uncertainties due to paucity of data, is of paramount importance in the field of biomechanics; in this perspective, Bayesian inference represents a promising approach. This study was focused on the analysis of the knee meniscus as a paradigmatic example of human soft tissue.
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Submitted 26 December, 2021;
originally announced December 2021.
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Circumferential Crack Modeling of Thin Cylindrical Shells in Modal Deformation
Authors:
Ali Alijani,
Olga Barrera,
Stephane P. A. Bordas
Abstract:
An innovative technique, called conversion, is introduced to model circumferential cracks in thin cylindrical shells. The semi-analytical finite element method is applied to investigate the modal deformation of the cylinder. An element including the crack is divided into three sub-elements with four nodes in which the stiffness matrix is enriched. The crack characteristics are included in the fini…
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An innovative technique, called conversion, is introduced to model circumferential cracks in thin cylindrical shells. The semi-analytical finite element method is applied to investigate the modal deformation of the cylinder. An element including the crack is divided into three sub-elements with four nodes in which the stiffness matrix is enriched. The crack characteristics are included in the finite element method relations through conversion matrices and a rotational spring corresponding to the crack. Conversion matrices obtained by applying continuity conditions at the crack tip are used to transform displacements of the middle nodes to those of the main nodes. Moreover, another technique, called spring set, is represented based on a set of springs to model the crack as a separated element. Components of the stiffness matrix related to the separated element are incorporated while the geometric boundary conditions at the crack tip are satisfied. The effects of the circumferential mode number, the crack depth and the length of the cylinder on the critical buckling load are investigated. Experimental tests, ABAQUS modeling and results from literature are used to verify and validate the results and derived relations. In addition, the crack effect on the natural frequency is examined using the vibration analysis based on the conversion technique.
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Submitted 15 May, 2021;
originally announced May 2021.
