Wide Field-of-View, Large-Area Long-wave Infrared Silicon Metalenses
Authors:
Hung-I Lin,
Jeffrey Geldmeier,
Erwan Baleine,
Fan Yang,
Sensong An,
Ying Pan,
Clara Rivero-Baleine,
Tian Gu,
Juejun Hu
Abstract:
Long-wave infrared (LWIR, 8-12 $μm$ wavelengths) is a spectral band of vital importance to thermal imaging. Conventional LWIR optics made from single-crystalline Ge and chalcogenide glasses are bulky and fragile. The challenge is exacerbated for wide field-of-view (FOV) optics, which traditionally mandates multiple cascaded elements that severely add to complexity and cost. Here we designed and ex…
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Long-wave infrared (LWIR, 8-12 $μm$ wavelengths) is a spectral band of vital importance to thermal imaging. Conventional LWIR optics made from single-crystalline Ge and chalcogenide glasses are bulky and fragile. The challenge is exacerbated for wide field-of-view (FOV) optics, which traditionally mandates multiple cascaded elements that severely add to complexity and cost. Here we designed and experimentally realized a LWIR metalens platform based on bulk Si wafers featuring 140$^\circ$ FOV. The metalenses, which have diameters exceeding 4 cm, were fabricated using a scalable wafer-level process involving photolithography and deep reactive ion etching. Using a metalens-integrated focal plane array, we further demonstrated wide-angle thermal imaging.
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Submitted 24 July, 2023;
originally announced July 2023.
