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Innovative NiAl Electrodes for Long-Term, Intermediate High-Temperature SAW Sensing Applications Using LiNbO$_3$ Substrates
Authors:
Jordan Maufay,
Baptiste Paulmier,
Mélanie Emo,
Ulrich Youbi,
Esther Mbina,
Thierry Aubert,
Ninel Kokanyan,
Sami Hage-Ali,
Michel Vilasi,
Omar Elmazria
Abstract:
Wireless SAW reflective delay line (R-DL) technology is very powerful to carry out remote measurements of various parameters under harsh environments, while enabling the identification of a given sensor among several of them. However, R-DL technology is currently limited to 350$^\circ$C for long-term applications, likely because of aluminium electrodes oxidation and/or congruent lithium niobate se…
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Wireless SAW reflective delay line (R-DL) technology is very powerful to carry out remote measurements of various parameters under harsh environments, while enabling the identification of a given sensor among several of them. However, R-DL technology is currently limited to 350$^\circ$C for long-term applications, likely because of aluminium electrodes oxidation and/or congruent lithium niobate segregation process. In this study, an innovative alloy, namely NiAl, is investigated as an alternative to Al to make R-DLs able to withstand high temperatures up to 500$^\circ$C on the long term. Indeed, NiAl gathers, in the bulk state, all the necessary properties (fairly low electrical resistivity and density, high melting temperature and resistance to oxidation). The study also examines the extent of the congruent LiNbO$_3$ segregation process, to determine its impact on the NiAl/LiNbO$_3$ R-DLs performances. The obtained results are very promising. NiAl electrodes self-passivate during the first 50h of annealing at 500$^\circ$C: 20 nm-thick Al$_2$O$_3$ layers form at the surface and in between the electrodes and the substrate, protecting the remaining NiAl layer from further oxidation. Besides, the segregation process occurs mainly in the same time. It is located in the first 150-200 nm of the substrate. Both phenomena have no significant impact on the performance of NiAl/LiNbO$_3$ R-DLs working at 433 MHz. Continuous in-situ electrical monitoring of such devices shows a standard deviation of the operating frequency of only 1.04 ppm during an annealing process of 250h at 500$^\circ$C. Moreover, the time-resolved S11 response of the device at the end of this treatment is not degraded at all. Thus, 433 MHz NiAl/LiNbO$_3$ R-DL sensors can operate with high fidelity for at least 10 days at 500$^\circ$C under air atmosphere, and there are strong signs that their lifetime is actually much longer.
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Submitted 12 September, 2023;
originally announced October 2023.
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Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600$^\circ$C
Authors:
Jérémy Streque,
Thierry Aubert,
Ninel Kokanyan,
Florian Bartoli,
Amine Taguett,
Vincent Polewczyk,
Edvard Kokanyan,
Sami Hage-Ali,
Pascal Boulet,
Omar Elmazria
Abstract:
Wireless surface acoustic wave (SAW) sensors constitute a promising solution to some unsolved industrial sensing issues taking place at high temperatures. Currently, this technology enables wireless measurements up to 600-700$^\circ$C at best. However, the applicability of such sensors remains incomplete since they do not allow identification above 400$^\circ$C. The latter would require the use of…
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Wireless surface acoustic wave (SAW) sensors constitute a promising solution to some unsolved industrial sensing issues taking place at high temperatures. Currently, this technology enables wireless measurements up to 600-700$^\circ$C at best. However, the applicability of such sensors remains incomplete since they do not allow identification above 400$^\circ$C. The latter would require the use of a piezoelectric substrate providing a large electromechanical coupling coefficient K 2 , while being stable at high temperature. In this letter, we investigate the potentiality of stoichiometric lithium niobate (sLN) crystals for such purpose. Raman spectroscopy and X-ray diffraction attest that sLN crystals withstand high temperatures up to 800$^\circ$C, at least for several days. In situ measurements of sLN-based SAW resonators conducted up to 600$^\circ$C show that the K 2 of these crystals remains high and stable throughout the whole experiment, which is very promising for the future achievement of identifiable wireless high-temperature SAW sensors.
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Submitted 2 May, 2019;
originally announced July 2019.
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Wireless and Batteryless Surface Acoustic Wave Sensors for High Temperature Environments
Authors:
Thierry Aubert,
O. Elmazria,
M. B. Assouar
Abstract:
Surface acoustic wave (SAW) devices are widely used as filter, resonator or delay line in electronic systems in a wide range of applications: mobile communication, TVs, radar, stable resonator for clock generation, etc. The resonance frequency and the delay line of SAW devices are depending on the properties of materials forming the device and could be very sensitive to the physical parameters of…
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Surface acoustic wave (SAW) devices are widely used as filter, resonator or delay line in electronic systems in a wide range of applications: mobile communication, TVs, radar, stable resonator for clock generation, etc. The resonance frequency and the delay line of SAW devices are depending on the properties of materials forming the device and could be very sensitive to the physical parameters of the environment. Since SAW devices are more and more used as sensor for a large variety of area: gas, pressure, force, temperature, strain, radiation, etc. The sensors based SAW present the advantage to be passive (batteryless) and/or wireless. These interesting properties combined with a small size, a low cost radio request system and a small antennas when operating at high frequency, offer new and exiting perspectives for wireless measurement processes and IDTAG applications. When the materials constituting the devices are properly selected, it becomes possible to use those sensors without embedded electronic in hostile environments (as high temperature, nuclear site, ...) where no solutions are currently used. General principle of the SAW sensor in wired and wireless configurations will be developed and a review of recent works concerning the field of high temperature applications will be presented with specific attention given to the choice of materials constituting the SAW device.
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Submitted 2 May, 2019;
originally announced July 2019.
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Study of tantalum and iridium as adhesion layers for Pt/LGS high temperature SAW devices
Authors:
Thierry Aubert,
Omar Elmazria,
Badreddine Assouar,
Laurent Bouvot,
Zoumnone Bournebe,
Michel Hehn,
Sylvain Weber,
Mourad Oudich,
Patrick Alnot
Abstract:
In this paper, we report on the use of tantalum and iridium as adhesion layers for platinum electrodes used in high temperature SAW devices based on langasite substrates (LGS). Unlike iridium, tantalum exhibits a great adhesive strength, and a very low mobility through the Pt film, ensuring a device lifetime of at least half an hour at 1000{\textdegree}C. The latter is limited by morphological mod…
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In this paper, we report on the use of tantalum and iridium as adhesion layers for platinum electrodes used in high temperature SAW devices based on langasite substrates (LGS). Unlike iridium, tantalum exhibits a great adhesive strength, and a very low mobility through the Pt film, ensuring a device lifetime of at least half an hour at 1000{\textdegree}C. The latter is limited by morphological modifications of platinum, starting by the apparition of crystallites on the surface, and followed by important terracing and breaking of the film continuity. SNMS and XRD measurements allowed us to show that these phenomena are likely intrinsic to platinum film, whatever be the nature of the adhesion layer. Finally, after having outlined a possible scenario leading to this deterioration, we consider some solutions that could replace platinum in order to increase the lifetime of LGS-based SAW devices in high temperatures conditions.
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Submitted 2 May, 2019;
originally announced May 2019.
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On-Chip Integrated Quantum-Dot Silicon-Nitride Microdisk Lasers
Authors:
Weiqiang Xie,
Thilo Stöferle,
Gabriele Rainò,
Tangi Aubert,
Suzanne Bisschop,
Yunpeng Zhu,
Rainer F. Mahrt,
Pieter Geiregat,
Edouard Brainis,
Zeger Hens,
Dries Van Thourhout
Abstract:
Hybrid SiN-QD microlasers coupled to a passive SiN output waveguide with 7μm diameter and record low threshold density of 27 μJ cm-2 are demonstrated. A new design and unique processing scheme starting from SiN/QD/SiN stacks offer long term stability and facilitate in depth laser characterization. This approach opens up new paths for optical communication, lab-on-a-chip, gas sensing and, potential…
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Hybrid SiN-QD microlasers coupled to a passive SiN output waveguide with 7μm diameter and record low threshold density of 27 μJ cm-2 are demonstrated. A new design and unique processing scheme starting from SiN/QD/SiN stacks offer long term stability and facilitate in depth laser characterization. This approach opens up new paths for optical communication, lab-on-a-chip, gas sensing and, potentially, on-chip cavity quantum electrodynamics and quantum optics.
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Submitted 18 January, 2019;
originally announced January 2019.
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Exciton spin dynamics and photoluminescence polarization of CdSe/CdS dot-in-rod nanocrystals in high magnetic fields
Authors:
B. Siebers,
L. Biadala,
D. R. Yakovlev,
A. V. Rodina,
T. Aubert,
Z. Hens,
M. Bayer
Abstract:
The exciton spin dynamics and polarization properties of the related emission are investigated in colloidal CdSe/CdS dot-in-rod (DiR) and spherical core/shell nanocrystal (NC) ensembles by magneto-optical photoluminescence (PL) spectroscopy in magnetic fields up to 15 T. It is shown that the degree of circular polarization (DCP) of the exciton emission induced by the magnetic field is affected by…
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The exciton spin dynamics and polarization properties of the related emission are investigated in colloidal CdSe/CdS dot-in-rod (DiR) and spherical core/shell nanocrystal (NC) ensembles by magneto-optical photoluminescence (PL) spectroscopy in magnetic fields up to 15 T. It is shown that the degree of circular polarization (DCP) of the exciton emission induced by the magnetic field is affected by the NC geometry as well as the exciton fine structure and can provide information on nanorod orientation. A theory to describe the circular and linear polarization properties of the NC emission in magnetic field is developed. It takes into account phonon mediated coupling between the exciton fine structure states as well as the dielectric enhancement effect resulting from the anisotropic shell of DiR NCs. This theoretical approach is used to model the experimental results and allows us to explain most of the measured features. The spin dynamics of the dark excitons is investigated in magnetic fields by time-resolved photoluminescence. The results highlight the importance of confined acoustic phonons in the spin relaxation of dark excitons. The bare core surface as well as the core/shell interface give rise to an efficient spin relaxation channel, while the surface of core/shell NCs seems to play only a minor role.
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Submitted 6 January, 2015;
originally announced January 2015.
