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Silicon microcavity arrays with open access and a finesse of half a million

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G. Wachter, S. Kuhn, S. Minniberger, C. Salter, P. Asenbaum, J. Millen, M. Schneider, J. Schalko, U. Schmid, A. Felgner, D. Hüser and M. Arndt are not registered as owners of this paper. (why?)