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Ion beam lithography for Fresnel zone plates in X-ray microscopy

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Kahraman Keskinbora, Michael Bechtel, Markus Weigand, Eberhard Goering, Achim Nadzeyka, Lloyd Peto, Stefan Rehbein, Gerd Schneider, Rolf Follath, Joan Vila-Comamala, Hanfei Yan and Gisela Schütz are not registered as owners of this paper. (why?)